| 摘要 |
<p>PURPOSE: To provide a device which is capable of assembling and disassembling basic elements of a container by involving their respective cabinet, vertical stocker means, entrance load lock means, operating means, loading load lock mechanism, automatic manipulator mechanism and compressed neutral gas supply means. CONSTITUTION: This device involves a cabinet 801, a vertical stocker means 604 which is mounted inside and provided with various kinds of bins 815, an input load lock means 810 which charges an element into the cabinet and an operation means 805 which places the element into the bins with high accuracy. It involves a load loadlock device which takes an interface with the outside of the cabinet near a conveyer 402 and an automatic manipulator mechanisms 807 which grabs the elements one by one from the bins and prepares an assembled container in the load loadlock device. Furthermore, the device is arranged to involve a very pure compressed neural gas capable of pressurizing the assembled container and a transportation mechanism 827 which transports the assembled pressurized container and an air circulation means.</p> |
