发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To prevent generation of cracks to improve reliability by using a Cu-base alloy showing the hardness under a high temperature which is only a half of that under the room temperature and also showing a very higher softening temperature for a metallic heat radiating plate of the device where a semiconductor element is mounted on an insulating substrate, metallic heat radiating plate and stress alleviating material on a metallic supporting plate of a power control element. CONSTITUTION:An IGBT module is formed by joining eight (8) Mo blocks 4 consisting of Cu-Cr-Zr heat radiating plate 3 in the thickness of 4mm and a heat stress alleviating material with Sn solder including Au of 20%. Eight semiconductor blocks 4 and electrodes of insulating layer through AlO are joined on the blocks 4 and Cu-Cr-Zr heat radiating plate 3 respectively with Sn-5%Sb solder. Moreover, the AlO ceramics of the insulated substrate 2 and a pure Cu supporting plate 1 are joined with Sn-40%Pb solder and thereafter a lead wire 13 is soldered. After an epoxy case 12 is placed thereon, the inside is filled with silicon gel 9. The metallic supporting plate 1 is made of a Cu group alloy which shows the hardness under a high temperature equal to a half of the hardness under the room temperature and also shows the softening temperature of 350 deg.C or more.
申请公布号 JPH07201895(A) 申请公布日期 1995.08.04
申请号 JP19930334908 申请日期 1993.12.28
申请人 HITACHI LTD 发明人 BABA NOBORU;OKAMURA HISANOBU;SAKAMOTO MASAHIKO;AKIYAMA HIROSHI;SAITO RYUICHI;KOIKE YOSHIHIKO;KITANO MAKOTO
分类号 H01L21/52;H01L25/07;H01L25/18 主分类号 H01L21/52
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