METHOD AND APPARATUS FOR PRODUCING SEMICONDUCTOR THIN FILM,申请号JP19930330858-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR PRODUCING SEMICONDUCTOR THIN FILM
摘要
申请公布号	JPH07188931(A)	申请公布日期	1995.07.25
申请号	JP19930330858	申请日期	1993.12.27
申请人	MITSUBISHI HEAVY IND LTD	发明人	TAKEUCHI YOSHIAKI
分类号	C23C16/50;C23C16/505;H01L21/203;H01L21/205;H01L21/285;H01L27/12;(IPC1-7):C23C16/50	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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