Process for manufacturing SiC-based ceramic precursors

摘要

A process for manufacturing SiC-based ceramic precursors by curing a polycarbosilane shaped body while it is in contact with vapor of at least one hydrocarbon selected from the group consisting of halogenated hydrocarbons and unsaturated hydrocarbons of ethylene series and acetylene series. This process can cure polycarbosilane shaped bodies without introducing oxygen thereinto and requires no special apparatuses. The obtained precursor is suited for synthesizing SiC-based ceramics efficiently without deteriorating characteristics thereof, particularly excellent in high-temperature strength.