发明名称 Method of making layer containing magnetic material
摘要 After forming a magnetic material contained layer on a substrate, a etching region of the magnetic material contained layer is scanned by a magnetic head, to arrange magnetic polarization in one direction. The magnetic material contained layer is separated into a ferro magnetic region which magnetic polarization is arranged in one direction, and a feeble magnetic region which magnetic polarization is not arranged in one direction. Thereafter, the ferro magnetic region is removed by use of a difference between etching rates caused by density of the magnetic fields of these two regions.
申请公布号 US5425844(A) 申请公布日期 1995.06.20
申请号 US19940262897 申请日期 1994.06.21
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 HIRATA, OSAMU
分类号 C23F4/00;G06K19/06;G11B5/852;G11B5/855;H01F10/18;H01F10/193;H01F41/16;H01F41/18;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306 主分类号 C23F4/00
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