| 摘要 |
The drive assembly includes a hollow cylinder shaft (31) mounted in a main body tube (30), a ceramic insulator (32) connected to the wafer chuck of R/F etch table in the shaft (31), a wafer fixing means having air cylinder (41) connected to the lower part of the tube (30), a matching box (33) for supplying the insulator (32) with R/F power, a conductor for electrically connecting between the matching box (32) and the ceramic insulator (32), the main tube (30) being separated from the matching box (33) to drive the air cylinder (41) smooth, and the ceramic insulator (32) being directly connected to the matching box (33) by using a coaxial cable (34) to prevent an arching due to the contact resistance.
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