| 摘要 |
<p>PURPOSE:To make an emitter electrode into a form suitable for field emission by minimizing the ratio of target dimension to target-base distance, and inserting a collimator between the target and the base. CONSTITUTION:The target dimension and the target 16-base 1 distance are set so that the solid angle of the target 16 seen from the base 1 is minimized, or a plate collimator having a fixed opening section is inserted between the target 16 and the base 1. The accumulated particle incident to the base 1 is limited to the component having an incident direction nearly vertical to the base. For example, when a base 14 is put in a position separated 75mm from a circular target 16 having a diameter of 50mm, the solid angle of the target 16 seen from the base 14 is omega20. While all the components omega20 of the accumulated particle close a first opening part 5 bored in a gate layer 4, the component capable of being accumulated as an emitter electrode is only the component capable of passing the part 5. Thus, an emitter electrode having a sharp form can be formed.</p> |
