| 摘要 |
PURPOSE:To provide the laser beam mask marker capable of marking different pictures at the same time, respectively on one work or plural works at the higher speed with high accuracy. CONSTITUTION:In the laser beam mask marker which marks a picture on the work surface 13 by raster-irradiating a picture plane 82 of a liquid-crystal mask 8 with a laser beam L1 from a laser beam oscillator 1 and irradiating the work surface 13 with its transmitted laser beam L2, a laser beam absorber 81 is provided on a frame plane of the upstream beam side picture plane 82 of the liquid-crystal mask 8 and optical path deflection means which deflects a laser beam irradiation optical path at any time from the picture plane 82 to the laser beam absorber 81 and further, from the laser beam absorber 81 to the picture plane 82 is provided. |
