发明名称 |
EVACUATION OF VACUUM CHAMBER FOR SUPERVACUUM AND METHOD OF SCAVENGING |
摘要 |
<p>PURPOSE: To adsorb an impurity or a contaminated substance efficiently and to discharge it from a chamber by feeding a heated non-reactive gas through the heated chamber. CONSTITUTION: A supply gas is heated to at least 90 deg.C by a heater 2 before entering a vacuum chamber 4. A flow-rate controller 3 may have a gas flow meter for maintaining the specific flow of the heated gas for the chamber 4. The temperature of a gas fed to the vacuum chamber 4 may be monitored by a thermocouple 6. Further, an additional heat is preferably applied to the vacuum chamber 4 by an independent source with a chamber heater 7. The independent heater 7 helps to maintain the gas temperature in the chamber 4 within a range of 90 deg.C to 250 deg.C normally while the non-reactive gas is swept out. The heat in the chamber 4 may be measured by a thermocouple 9 and heat input from the independent heater 7 may be controlled.</p> |
申请公布号 |
JPH0778775(A) |
申请公布日期 |
1995.03.20 |
申请号 |
JP19940149814 |
申请日期 |
1994.06.30 |
申请人 |
APPLIED MATERIALS INC |
发明人 |
AIFUA CHIEN;ROBAATO EE CHIYATSUPUMAN |
分类号 |
C23C14/24;B01J3/00;C23C14/56;C23C16/44;C30B23/02;C30B25/14;H01L21/203;H01L21/205;(IPC1-7):H01L21/205 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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