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发明名称
DRY ETCHING
摘要
申请公布号
JPH0766211(A)
申请公布日期
1995.03.10
申请号
JP19930213205
申请日期
1993.08.27
申请人
SONY CORP
发明人
KADOMURA SHINGO
分类号
H01L21/302;H01L21/3065;H01L21/3213;H01L21/768;(IPC1-7):H01L21/321;H01L21/306
主分类号
H01L21/302
代理机构
代理人
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