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发明名称
SEMICONDUCTOR WAFER CLEANING DEVICE
摘要
申请公布号
JPH0737852(A)
申请公布日期
1995.02.07
申请号
JP19930200235
申请日期
1993.07.20
申请人
NIPPON STEEL CORP
发明人
KOBAYASHI SATOSHI
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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