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发明名称
SUBSTRATE TRANSFER DEVICE
摘要
申请公布号
JPH0714908(A)
申请公布日期
1995.01.17
申请号
JP19930151818
申请日期
1993.06.23
申请人
NEC CORP
发明人
SENBONMATSU SHIGERU
分类号
B25J9/10;B25J9/06;B25J19/00;B65G49/07;H01L21/677;H01L21/68;(IPC1-7):H01L21/68
主分类号
B25J9/10
代理机构
代理人
主权项
地址
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