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发明名称
MOUNTING DEVICE FOR LOW TEMPERATURE AEROSOL CLEANING PROCESS
摘要
申请公布号
JPH078930(A)
申请公布日期
1995.01.13
申请号
JP19940104171
申请日期
1994.05.18
申请人
发明人
分类号
B08B7/02;B01F3/00;B01F3/02;B08B7/00;B24C1/00;B24C9/00;H01L21/00;H01L21/304;(IPC1-7):B08B7/02
主分类号
B08B7/02
代理机构
代理人
主权项
地址
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