Feed mechanism.

摘要

A static pressure lead screw includes a porous ceramic body (11) having fluid flow paths as part of a flank (9). The porous ceramic body (11) is fixed by a tubular base member (20) through which the fluid does not flow. Fluid guide holes (12) for supplying the fluid to the porous body (11) extend through the tubular base member (20) and are connected to the porous body (11). In a preferred embodiment, an electroless-plated layer is formed in a surface layer of the flank or an inner portion continuous with the surface layer, thereby obtaining various high-accuracy static pressure guides with high statical stiffness.