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发明名称
Methode zur Passivierung von geätzten Spiegelfacetten von Halbleiterlasern.
摘要
申请公布号
DE69009474(T2)
申请公布日期
1994.12.01
申请号
DE1990609474T
申请日期
1990.09.14
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US
发明人
BUCHMANN, PETER, CH-8135 LANGNAU AM ALBIS, CH;WEBB, DAVID J., CH-8803 RUESCHLIKON, CH;VETTIGER, PETER, CH-8135 LANGNAU AM ALBIS, CH
分类号
H01L21/308;H01L21/306;H01L21/314;H01L21/316;H01L21/318;H01S5/00;H01S5/02;H01S5/028;(IPC1-7):H01S3/025;H01L33/00
主分类号
H01L21/308
代理机构
代理人
主权项
地址
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