| 摘要 |
PURPOSE:To simplify the constitution of a power feeding route, and uniform the charging of each capacitor for discharging, by connecting capacitors for discharging, along the length direction of power feeding conductor. CONSTITUTION:The discharge current from charging capacitors flows in power feeding conductor 21 from its both end portions 22, 23, via lead lines 26, 27, and charges each capacitor 4 in order from both ends. In the cource of charging, discharge for preliminary ionization is generated between electrodes 5. When each capacitor 4 is charged, discharge is caused between main electrodes 2 and 3, and laser light is generated. The laser light is casted outside a chamber 1 through output windows 29 formed in the side boards 29. The charging of capacitors 4 arranged in a row along the length direction of the main electrodes 2, 3 is started at the same time form both ends of the row. Hence the difference of charged state between the capacitor 4 charged in the first place and the capacitor 4 charged in the end does not exist, and uniform charging is realized. |
