| 摘要 |
PURPOSE:To provide a wire bonder, which is capable of performing a wire bonding while correcting the positional deviation of a capillary tool in the longitudinal direction of a horn, which is generated with the rotation of the horn to the vertical direction. CONSTITUTION:In the case where while a horn 1 is rotated in the vertical directions N, a wire bonding is performed by a capillary tool 2 with a wire 3 inserted therein, a correction arithmetic circuit 38 for operating the amount DELTAY of the positional deviation of the tool 2 in the longitudinal direction of the horn 1, which is generated with the rotation of the horn 1 to the vertical directions N, is provided and the operated result is inputted in a third driver 37 of a motor MY in the direction Y, whereby while the movement of the tool 2 in the direction Y is corrected, the wire bonding is performed. In such a way, a wire bonder is constituted. |
