| 摘要 |
PURPOSE:To enhance accuracy in the measurement of distance between an acoustic lens and a sample. CONSTITUTION:The ultrasonic measuring equipment comprises burst wave generating means 21, 22, an acoustic lens 26 outputting ultrasonic waves in a plurality of directions, means 24 for converting the burst wave into an ultrasonic wave being made incident on the acoustic lens 26 and converting ultrasonic waves reflected on a sample S and a reference object into electric signals, and means 44 for varying the relative distance between the acoustic lens 26 and the sample S. The measuring equipment further comprises means for capturing reflection signals from the reference object corresponding to burst waves of more than one frequency and determining the relative distance between the acoustic lens 26 and the sample S in the direction of Z-axis. |
