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发明名称
INSPECTION APPARATUS FOR CIRCUIT PATTERN OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06229937(A)
申请公布日期
1994.08.19
申请号
JP19930018308
申请日期
1993.02.05
申请人
NEC YAMAGATA LTD
发明人
HASEGAWA TOMOKO
分类号
G01N21/88;G01N21/94;G01N21/956;H01L21/66;(IPC1-7):G01N21/88
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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