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发明名称
SEMICONDUCTOR SENSOR
摘要
申请公布号
JPH06208693(A)
申请公布日期
1994.07.26
申请号
JP19930002790
申请日期
1993.01.11
申请人
MITSUBISHI ELECTRIC CORP
发明人
ARAKI TATSU
分类号
G01P15/08;G01P21/00;G01P21/02;G08B29/06;H01L29/84;(IPC1-7):G08B29/06
主分类号
G01P15/08
代理机构
代理人
主权项
地址
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