| 发明名称 |
Metallo-organic precursors to titanium nitride |
| 摘要 |
A titanium tetrahalide is reacted with a primary alkyl or aryl amine to prepare a metallo-organic precursor, which thereafter may be volatilized to form a gaseous chemical vapor deposition precursor to titanium nitride, or may be pyrolyzed to form bulk titanium nitride.
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| 申请公布号 |
US5330793(A) |
申请公布日期 |
1994.07.19 |
| 申请号 |
US19920971655 |
申请日期 |
1992.11.05 |
| 申请人 |
FORD MOTOR COMPANY |
发明人 |
WINTER, CHARLES H.;LEWKEBANDARA, TILAK S.;PROSCIA, JAMES W.;SHERIDAN, PHILIP H. |
| 分类号 |
C01B21/076;C03C17/22;C07F7/00;C23C16/34;(IPC1-7):C23C16/00 |
主分类号 |
C01B21/076 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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