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发明名称
PROCESS OF MANUFACTURE OF CHARGE-COUPLED DEVICES
摘要
申请公布号
RU2014671(C1)
申请公布日期
1994.06.15
申请号
SU19914938534
申请日期
1991.05.24
申请人
TSENTRALNYJ NAUCHNO-ISSLEDOVATELSKIJ INSTITUT "ELEKTRON"
发明人
BULGAKOV ALEKSANDR G;KIRIENKO VLADIMIR G;SANIN KONSTANTIN V
分类号
H01L21/322;(IPC1-7):H01L21/322
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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