| 摘要 |
PURPOSE:To classify distinct surface abnormalities due to carbide on inspected materials or due to water drops to allow the detection of only specific surface abnormalities as defects. CONSTITUTION:A defect detector 10 comprises the defect detecting part 12 which consists of a reference value setting means 31 for signals, a non-constancy detecting means 32 to detect the non-constancy of the surface based on a shift from a reference value, a polarity judging means 33 for the reference value, a polarity information holding means 34 to hold polarity information and an abnormality classifying means 35 to classify surface abnormalities in accordance with the polarity information. |
