Amorphisierungsverfahren zur Strukturierung eines Halbleiterkörpers.,申请号DE19905005042-传众专利搜索

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发明名称	Amorphisierungsverfahren zur Strukturierung eines Halbleiterkörpers.
摘要
申请公布号	DE59005042(D1)	申请公布日期	1994.04.28
申请号	DE19905005042	申请日期	1990.02.01
申请人	LICENTIA PATENT-VERWALTUNGS-GMBH, 60596 FRANKFURT, DE	发明人	KOENIG, ULF, DR.-ING., D-7900 ULM, DE;KUISL, MAXIMILIAN, DR.RER.NAT., D-7900 ULM, DE
分类号	H01L21/265;H01L21/76;(IPC1-7):H01L21/76	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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