METHOD FOR JOINING SILICON NITRIDE-BASED CERMIC TO METAL

摘要

PURPOSE:To provide a method for joining a silicon nitride-based ceramic to a metal by which satisfactory bonding strength can be expected even in the air at a high temp. and the field of utilization of the resulting joined body can be considerably extended. CONSTITUTION:An intermediate material is interposed between a silicon nitride- based ceramic and a joining metal having >=1,300 deg.C melting temp. and contg. one or more kinds of metals whose change of free energy is negative. The three materials are then joined by heating to at 1,300 deg.C to a temp. below the melting temp. of the joining metal in <=10<-10>Torr vacuum.