THIN FILM FORMING METHOD USING METAL IONS AND ITS DEVICE,申请号JP19920273391-传众专利搜索

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发明名称	THIN FILM FORMING METHOD USING METAL IONS AND ITS DEVICE
摘要
申请公布号	JPH06103953(A)	申请公布日期	1994.04.15
申请号	JP19920273391	申请日期	1992.09.18
申请人	ELIONIX KK	发明人	ONO SUSUMU
分类号	C23C14/32;H01J37/08;H01J37/30;(IPC1-7):H01J37/30	主分类号	C23C14/32
代理机构		代理人
主权项
地址

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