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发明名称
CIRCUIT FOR RELIABILITY EVALUATION
摘要
申请公布号
JPH0697256(A)
申请公布日期
1994.04.08
申请号
JP19920270805
申请日期
1992.09.16
申请人
SONY CORP
发明人
TANI KAZUHIKO
分类号
H01L21/66;H01L21/768;H01L23/522;(IPC1-7):H01L21/66;H01L21/90
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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