FIELD EMISSION CATHODE DEVICE

摘要

PURPOSE:To conveniently insulate a cathode layer when a semiconductor substrate is employed in a field emission cathode device. CONSTITUTION:In a field emission cathode device in which emitter tips 18 each connected to a cathode layer are disposed in holes provided in an insulating layer 20 and a gate electrode layer 22 which are laid one over the other, the cathode layer 16 is provided on the surface of a semiconductor substrate 14 and is formed of a semiconductor of different conductivity from that of the surface of the semiconductor substrate 14.