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发明名称
摘要
申请公布号
JPH0571185(B2)
申请公布日期
1993.10.06
申请号
JP19870298998
申请日期
1987.11.27
申请人
NIPPON ELECTRIC CO
发明人
KIMURA TOMOAKI
分类号
H01L29/20;H01L21/28;H01L21/822;H01L27/04;H01L29/41;H01L29/43;(IPC1-7):H01L27/04;H01L29/44;H01L29/46
主分类号
H01L29/20
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