NON-CONTACTING METHOD OF CLEANING SURFACES WITH A PLANAR GAS BEARING,申请号EP19890100346-传众专利搜索

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发明名称	NON-CONTACTING METHOD OF CLEANING SURFACES WITH A PLANAR GAS BEARING
摘要
申请公布号	EP0324435(B1)	申请公布日期	1993.09.29
申请号	EP19890100346	申请日期	1989.01.10
申请人	ETEC SYSTEMS, INC.	发明人	DEAN, ROBERT L.;YOUNG, LYDIA J.;VENEKLASEN, LEE H.
分类号	B08B5/02;C23G5/00;H01L21/304	主分类号	B08B5/02
代理机构		代理人
主权项
地址

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