| 摘要 |
PURPOSE: To monitor the sealability of a coupling part during manufacturing by constituting one or more plates in a diaphragm shape in the range of a hollow chamber capable of deforming it by the pressure in the chamber. CONSTITUTION: Lower and upper side plates 2, 3 are assembled with one another, and hollow chambers 4, 20 are formed. The chamber 4 is provided in the plate 3 by etching, and the plate 3 is thin and deformable as a diaphragm 5. A sensor member 1 is hermetically sealed in the chamber 20, and the plates 2, 3 are made of single crystalline material of silicon, gallium arsenide, germanium. The diaphragm 5 is specified in size capable of deforming by the pressure difference between the chamber 4 and the circumference thereof, and the deformation is measured by optical or mechanical measurement. The measurement of the deformation represents the content of the pressure in the chamber 4. Thus, the internal pressure of the sensor can be always inspected, and the sealability can be specified. |
