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发明名称
PREVENTING METHOD AND DEVICE FOR MIST SCATTER ON ROTARY PLATE
摘要
申请公布号
JPH05162075(A)
申请公布日期
1993.06.29
申请号
JP19910349962
申请日期
1991.12.09
申请人
SHIN ETSU HANDOTAI CO LTD
发明人
TANAKA KOICHI;HASHIMOTO HIROMASA;SUZUKI FUMIO
分类号
B24B55/12
主分类号
B24B55/12
代理机构
代理人
主权项
地址
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