发明名称 METHOD FOR MANUFACTURING SUPERCONDUCTING THIN FILM FORMED OF OXIDE SUPERCONDUCTOR HAVING NON SUPERCONDUCTING REGION IN IT, METHOD FOR MANUFACTURING SUPERCONDUCTING DEVICE UTILIZING THE SUPERCONDUCTING THIN FILM AND SUPERCONDUCTING THIN FILM MANUFACTURED THEREBY
摘要
申请公布号 EP0534811(A3) 申请公布日期 1993.06.02
申请号 EP19920402354 申请日期 1992.08.27
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 TANAKA, SO, CABINET BALLOT-SCHMIT;IIYAMA, MICHITOMO, CABINET BALLOT-SCHMIT
分类号 H01L39/14;H01L39/24;(IPC1-7):H01L39/24;H01L39/22 主分类号 H01L39/14
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