METHOD AND DEVICE FOR FORMING FILM BY GAS DEPOSITION,申请号JP19910197833-传众专利搜索

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发明名称	METHOD AND DEVICE FOR FORMING FILM BY GAS DEPOSITION
摘要
申请公布号	JPH0544019(A)	申请公布日期	1993.02.23
申请号	JP19910197833	申请日期	1991.08.07
申请人	VACUUM METALLURGICAL CO LTD	发明人	FUCHIDA HIDETSUGU
分类号	C23C14/24;C03C17/09	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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