LIQUID PHASE GROWTH METHOD

摘要

PURPOSE:To improve quality and yield of a compound semiconductor by effectively suppressing occurrence of face defect in liquid phase growth of the compound semiconductor. CONSTITUTION:In liquid phase growth of a compound semiconductor, an atmosphere around a substrate and a solution before start of the growth is kept by a mixed gas consisting of >=80% hydrogen and an inert gas of the residual part or 100% hydrogen, and the atmosphere is changed over to a mixed gas consisting of <=60% hydrogen and an inert gas of the residual part immediately before start of growth.