PLASMA VAPOR PHASE GROWTH DEVICE,申请号JP19910145548-传众专利搜索

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发明名称	PLASMA VAPOR PHASE GROWTH DEVICE
摘要
申请公布号	JPH04342494(A)	申请公布日期	1992.11.27
申请号	JP19910145548	申请日期	1991.05.21
申请人	NEC CORP	发明人	DEN YASUHIDE
分类号	B01J19/08;C23C16/50;C23C16/511;C30B25/02;H01L21/205;H01L21/31	主分类号	B01J19/08
代理机构		代理人
主权项
地址

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