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发明名称
TESTING DEVICE FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH04280647(A)
申请公布日期
1992.10.06
申请号
JP19910043824
申请日期
1991.03.08
申请人
FUJITSU LTD
发明人
ABE KATSUJI
分类号
G01R1/073;G01R31/26;H01L21/66
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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