摘要 |
<p>To reduce the number of steps of manufacturing a DC superconducting quantum interference device (as will be shortly referred to as "DC-SQUID"), which is to be applied to a highly sensitive electromagnetic sensor, an ammeter, a displacement meter a high-frequency signal amplifier or the like, thereby to improve the production yield. At the time of manufacturing the DC-SQUID, the number of masks is reduced to reduce the number of total steps by simultaneously performing the steps of fabricating an input coil 3 and a feedback coil 2 and the step of fabricating an counter electrode 13 of the components including a pick-up coil 1, the feedback coil 2, the input coil 3, a Josephson junction 10, a washer coil 11 and the counter electrode. <IMAGE></p> |