发明名称 Process for manufacturing DC superconducting quantum interference device.
摘要 <p>To reduce the number of steps of manufacturing a DC superconducting quantum interference device (as will be shortly referred to as "DC-SQUID"), which is to be applied to a highly sensitive electromagnetic sensor, an ammeter, a displacement meter a high-frequency signal amplifier or the like, thereby to improve the production yield. At the time of manufacturing the DC-SQUID, the number of masks is reduced to reduce the number of total steps by simultaneously performing the steps of fabricating an input coil 3 and a feedback coil 2 and the step of fabricating an counter electrode 13 of the components including a pick-up coil 1, the feedback coil 2, the input coil 3, a Josephson junction 10, a washer coil 11 and the counter electrode. <IMAGE></p>
申请公布号 EP0501220(A2) 申请公布日期 1992.09.02
申请号 EP19920102267 申请日期 1992.02.11
申请人 SEIKO INSTRUMENTS INC. 发明人 SHIMIZU, NOBUHIRO;CHINONE, KAZUO;CHIBA, NORIO
分类号 G01R33/035;H01L39/22;H01L39/24 主分类号 G01R33/035
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