| 摘要 |
<p>PURPOSE:To prevent occurrence of cracks in a dye preventing layer film and a colored layer separating film and scattering and attenuation of light in producing a color filter for use in a solid-state image pickup element and liquid crystal display. CONSTITUTION:This color filter is formed by successively forming on a substrate 1 a red layer 2, a dye preventing film 3 made of CVD-SiO2, a colored layer separating film 5 made of CVD-SiO2, and a green layer 6, a dye preventing film 7 made of CVD-SiO2, a colored layer separating film 8 made of CVD-SiO2, and a blue layer 9, a dye preventing film 10 made of CVD-SiO2, and a cover film 11. The CVD-SiO2 film is formed by the low temperature plasma CVD process.</p> |
