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发明名称
VAPOR-PHASE SYNTHESIS OF DIAMOND
摘要
申请公布号
JPH04209795(A)
申请公布日期
1992.07.31
申请号
JP19900339359
申请日期
1990.11.30
申请人
HITACHI CHEM CO LTD
发明人
YAMANOI KIYOSHI;INOUE MITSUHIRO
分类号
C30B25/14;C30B29/04;H01L21/205
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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