VERFAHREN ZUR NASSCHEMISCHEN HERSTELLUNG EINES OBERFLAECHENGITTERS MIT EINER BESTIMMTEN GITTERKONSTANTE AUF DER OBERFLAECHE EINES SUBSTRATS AUS EINEM KRISTALLMATERIAL.

摘要

In a wet chemical process to produce a surface grating with a certain grating constant on the surface of a crystal substrate, a preliminary grating is first produced with the desired constant but with a lesser corrugation. In the second stage, the grating is held for a certain time in contact with an anisotropic etchant, which has a very slow etching action in a direction at an oblique angle to the substrate surface.