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发明名称
FILM FORMING DEVICE
摘要
申请公布号
JPH04198472(A)
申请公布日期
1992.07.17
申请号
JP19900332736
申请日期
1990.11.29
申请人
HITACHI LTD
发明人
KAMEI MITSUHIRO;SETOYAMA HIDETSUGU
分类号
C23C14/22;C23C14/34;C23C14/54
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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