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发明名称
TEST HEAD FOR MEASURING CHARACTERISTICS OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH04147639(A)
申请公布日期
1992.05.21
申请号
JP19900272778
申请日期
1990.10.11
申请人
NEC KYUSHU LTD
发明人
SUETSUGU TOSHIYUKI
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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