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发明名称
VERFAHREN ZUR RESISTFREIEN STRUKTURIERUNG EINER ALUMINIUMSCHICHT
摘要
申请公布号
DD299343(A5)
申请公布日期
1992.04.09
申请号
DD19890332634
申请日期
1989.09.14
申请人
VEB FORSCHUNGSZENTRUM MIKROELEKTRONIK DRESDEN,DE
发明人
THOMAS,ANDREAS,DE;ZEHE,ALFRED,DE;SEIDOWSKI,ECKART,DE
分类号
H01L21/265;(IPC1-7):H01L21/90
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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