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发明名称
摘要
申请公布号	JPH0420985(B2)	申请公布日期	1992.04.07
申请号	JP19860292859	申请日期	1986.12.08
申请人	HANDOTAI ENERGY KENKYUSHO	发明人	YAMAZAKI SHUNPEI;HIROSE NAOKI;TASHIRO MAMORU;INUSHIMA TAKASHI
分类号	C23C16/26;C23C16/27;C23C16/32;C23C16/34;C23C16/40;C23C16/42;C23C16/50;C23C16/511	主分类号	C23C16/26
代理机构		代理人
主权项
地址

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