发明名称 |
Pulsed chemical vapor deposition of gradient index optical material |
摘要 |
Periodic pulsing of the gaseous reactant flows during chemical vapor deposition of gradient index optical material markedly improves the refractive index homogeneity of the deposit with the frequency of the pulsing being variable over a wide range but the number and size of the inhomogeneities, or nodules, being significantly reduced at higher pulsing frequencies.
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申请公布号 |
US5102694(A) |
申请公布日期 |
1992.04.07 |
申请号 |
US19900588788 |
申请日期 |
1990.09.27 |
申请人 |
CVD INCORPORATED |
发明人 |
TAYLOR, RAYMOND L.;DESAI, HEMANT D. |
分类号 |
C23C16/30;C23C16/44;C23C16/455;G02B1/00 |
主分类号 |
C23C16/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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