| 摘要 |
PURPOSE:To suppress the occurrence of a smear phenomenon by condensing light entering a condensing lens to the photosensitive sections of a semiconductor substrate and making light entering the other section reflect from a mirror to the photosensitive sections. CONSTITUTION:Photosensitive sections 2 are formed in the surface of a P type semiconductor substrate 1, which is coated with an insulating protective film 3. Light shielding films 4 are formed in the protective film 3. The protective film 3 is coated with an Al film 21 and the Al film 21 is coated with a photoresist layer 22. The photoresist layer 22 is patterned to make holes 23 to make a resist pattern 26. The Al layer 21 becomes a mirror 13 by over- etching the Al layer 21 with the resist pattern 26 used as a mask. The resist pattern 26 is removed and a protective film 5a is formed. A Ye layer 6, a Cy layer 7, an Mg layer 8, protective films 5b-5d, and micro lenses 10, 10 are formed on the protective film 5a. Thereby a smear phenomenon is suppressed and sensitivity is improved. |
