ETCHING METHOD FOR REAR OF SEMICONDUCTOR WAFER,申请号JP19900187224-传众专利搜索

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发明名称	ETCHING METHOD FOR REAR OF SEMICONDUCTOR WAFER
摘要
申请公布号	JPH0474418(A)	申请公布日期	1992.03.09
申请号	JP19900187224	申请日期	1990.07.17
申请人	OKI ELECTRIC IND CO LTD	发明人	HORIO TAKUJI
分类号	H01L21/302;H01L21/304;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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