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经营范围
发明名称
CLEAN ROOM
摘要
申请公布号
JPH02217736(A)
申请公布日期
1990.08.30
申请号
JP19890036176
申请日期
1989.02.17
申请人
HITACHI LTD
发明人
TSUZUKI KOICHI
分类号
F24F7/06
主分类号
F24F7/06
代理机构
代理人
主权项
地址
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