发明名称 PRODUCTION OF FINE METAL BALL
摘要 PURPOSE:To form metal wire chips into fine balls by irradiating metal wire chips with high energy beam to heat the above metal wire chips up to a temp. not lower than the melting point of the metal wire chips and carrying out melting. CONSTITUTION:Cut metal wire chips 10 are placed on a rotary table 2 and moved to the irradiation position of high energy beam, and the above metal wire chips 10 are irradiated with high energy beam, by which the metal wire chips are heated up to a temp. higher than the melting point of the metal to undergo melting. Since molten metal is usually increased in surface tension, the metal is changed into ball shape by itself in molten state. The resulting metal in ball shape is formed into fine metal balls 20 by means of gentle cooling and solidification, and these balls 20 are finally dropped via a guide 8 into a recovery vessel 6 and recovered. In the case where a high energy beam concentrated by means of a concentration mechanism, such as lens, the fine metal wire chips can be efficiently heated by concentration of energy and can be melted in a short time.
申请公布号 JPH0466603(A) 申请公布日期 1992.03.03
申请号 JP19900179265 申请日期 1990.07.06
申请人 NIPPON STEEL CORP 发明人 MARUYAMA TADAKATSU;ONO TAKAHIDE;KITAMURA OSAMU;UNO TOMOHIRO;KIKUCHI TOSHIJI;SUZUKI YASUHIRO
分类号 B21F99/00;B22F1/00;B22F9/06;B23K35/40;H01L21/321;H01L21/60 主分类号 B21F99/00
代理机构 代理人
主权项
地址